Aluminum nitride granule (ALN granule) is made by spray granulation of Aluminum nitride powder (ALN powder), containing binder and sintering aids, is raw material of high thermal conductivity ceramics,which can be directly pressed and formed.ALN granule of Juci Technology has good fluidity, high sintering activity, high purity and high strength, is used to make various semiconductor equipment parts such as aluminum nitride heater/electrostatic sucker/etching protective cover/hot pressed aluminum nitride ceramics.
Item No :
GS-80/GX-80/GS-BOrder(MOQ) :
1KGProduct Origin :
CHINAColor :
Gray-whiteProduct characteristics:
1.High Purity
2.Ready for press
3.High strength
4.High sintering activity
5.High fluidity
Aluminum Nitride Granule SEM
Data Sheet | ||||
Item | GS-80 | GX-80 | GS-B | |
Mean particle size (μm) | 70~120 | 70~120 | 70~120 | |
Y2O3 (WT%) | 5 | 5 | 0 | |
Bulk density (g/cm3) | 1.0~1.2 | 1.0~1.2 | 1.0~1.2 | |
Fluidity (s/50g) | <90 | <90 | <90 | |
Impurity | Ca (ppm) | <200 | <200 | <200 |
Si (ppm) | <100 | <250 | <100 | |
Fe (ppm) | <10 | <50 | <10 |
Application :
ALN ceramics : Heater / Electrostatic suction cups / Etching guards / Hot pressed aluminum nitride ceramics
Press features Debind features
Debind process
<2℃/min before 200℃, < 1.5℃ /min before 300℃,< 1℃ /min before 400℃,
<1℃/min before 500℃. Hold the temperature at heating and highest temperature
stage based on the product size to ensure complete decomposition and removal
of organic substances,hold 2-10 hrs.
Sintering process
Sintering temperature 1800~1850℃, hold 4~12 hrs based on the product size , Flow Nitrogen, 0.1MPa
Package
15kg/bucket
aluminum nitride granule is packed in aluminum foil bags filled with nitrogen and then in iron drums.
Our advantage
Xiamen Juci Company has a plant area of 30,000 square meters, and the production workshop is equipped with 30 sets of single sintering furnaces, as well as 8 sets of advanced continuous sintering furnaces, with a production capacity of up to 1,000 tons/year of aluminum nitride powder. The testing center is about 800 square meters, equipped with more than 100 sets of professional powder and ceramics testing equipments such as scanning electron microscope, particle size meter, nitrogen-oxygen analyzer, powder comprehensive tester, thermal conductivity meter and so on. The company has a R&D center with an area of 1200 square meters, equipped with more than 40 sets of R&D special equipment, and a R&D team of more than 30 people who constantly promote product optimization and innovation, so that the company can maintain its competitive advantage in the fierce market competition.
Company Production Line
ISO Cetrificate
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